Mr. Haim Pearl Profile

Haim Pearl

at Applied Materials Inc.

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Author

Publications (3)

Proceedings Article | 13 March 2024 Presentation + Paper

Novel photonics dielectric substrate process integration development cycle time reduction by inline Xe plasma FIB

Mona Feige, Daniel Schmitt, Ute Vogler, Haim Pearl, Allen Lee, Thomas Schubert

Proceedings Volume 12906, 1290608 (2024) https://doi.org/10.1117/12.3001337

KEYWORDS: Semiconducting wafers, Scanning electron microscopy, Sapphire, Process control, Sensors, Gallium arsenide, Inspection, Image processing, Gallium nitride, Silicon carbide

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Proceedings Article | 20 March 2020 Presentation + Paper

Three-dimensional feature characterization by inline Xe plasma FIB: delayering and deep milling implementation

Franz Niedermeier, Agnes Fros, Max Böckl, Wolfgang Kipferl, Michaela Braun, Albert Birner, Haim Pearl, Thomas Schubert, Allen Lee

Proceedings Volume 11325, 1132512 (2020) https://doi.org/10.1117/12.2551657

KEYWORDS: Critical dimension metrology, Semiconducting wafers, Process control, 3D metrology, Back end of line, Front end of line, Image quality, 3D image processing, Xenon, Plasma

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Proceedings Article | 8 March 2016 Paper

Detection of electrical defects with SEMVision in semiconductor production mode manufacturing

Travis Newell, Brock Tillotson, Haim Pearl, Andrei Miller

Proceedings Volume 9778, 97783I (2016) https://doi.org/10.1117/12.2219254

KEYWORDS: Inspection, Scanning electron microscopy, Defect detection, Process control, Semiconductor manufacturing, Optical lithography, Image processing, Semiconductors, Manufacturing, Lithography, Semiconducting wafers, Virtual colonoscopy, Optical inspection, Metals

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