Dr. Haiping Zhang
at KLA-Tencor Corp
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | December 4, 2008
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Polishing, Scattering, Particles, Crystals, Light scattering, Coating, Inspection, Scanning electron microscopy, Semiconducting wafers, Defect inspection

PROCEEDINGS ARTICLE | March 26, 2007
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Optical lithography, Calibration, Particles, Inspection, Bridges, Wafer inspection, Immersion lithography, Photoresist processing, Semiconducting wafers, Defect inspection

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