Dr. Haiping Zhang
at KLA Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 4 December 2008
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Polishing, Scattering, Particles, Crystals, Light scattering, Coating, Inspection, Scanning electron microscopy, Semiconducting wafers, Defect inspection

Proceedings Article | 26 March 2007
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Optical lithography, Calibration, Particles, Inspection, Bridges, Wafer inspection, Immersion lithography, Photoresist processing, Semiconducting wafers, Defect inspection

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