Dr. Haisheng San
at Xiamen Univ
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 18 May 2009
Proc. SPIE. 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
KEYWORDS: Mid-IR, Silica, Etching, Silicon, Plasmas, Photonic crystals, Silicon films, Infrared radiation, Aluminum, Semiconducting wafers

Proceedings Article | 1 May 2008
Proc. SPIE. 6940, Infrared Technology and Applications XXXIV
KEYWORDS: Microelectromechanical systems, Thermography, Infrared imaging, Modulation, Silica, Silicon, Infrared radiation, Deep reactive ion etching, Semiconducting wafers, Temperature metrology

Proceedings Article | 30 April 2008
Proc. SPIE. 6959, Micro (MEMS) and Nanotechnologies for Space, Defense, and Security II
KEYWORDS: Gold, Electron beam lithography, Switches, Iron, Ferromagnetics, Resistance, Magnetism, Electronic components, Electron transport, Temperature metrology

Proceedings Article | 8 January 2008
Proc. SPIE. 6836, MEMS/MOEMS Technologies and Applications III
KEYWORDS: Microelectromechanical systems, Thermography, Infrared imaging, Modulation, Silica, Silicon, Infrared radiation, Deep reactive ion etching, Semiconducting wafers, Absorption

Proceedings Article | 4 January 2008
Proc. SPIE. 6836, MEMS/MOEMS Technologies and Applications III
KEYWORDS: Microelectromechanical systems, Switches, Electrodes, Metals, Dielectrics, Interfaces, Ions, Silicon, Bridges, Ion implantation

Proceedings Article | 4 January 2008
Proc. SPIE. 6836, MEMS/MOEMS Technologies and Applications III
KEYWORDS: Microelectromechanical systems, Switches, Capacitors, Metals, Dielectrics, Silicon, Reliability, Capacitance, Bridges, Aluminum

Showing 5 of 11 publications
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