Prof. Haitao Liu
at University of Pittsburgh
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 7 October 2019 Paper
Proc. SPIE. 11168, Advanced Manufacturing Technologies for Micro- and Nanosystems in Security and Defence II
KEYWORDS: Nanostructures, Optical lithography, Silica, Graphene, Etching, Polymers, Silicon, Humidity, Nanofabrication, Nanolithography

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