Mr. Haitao Zhang
at CIOMP
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | September 27, 2016
Proc. SPIE. 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment
KEYWORDS: Diffraction, Monochromatic aberrations, Mirrors, Point diffraction interferometers, Interferometers, Wavefronts, Wavefront aberrations, Optical testing, Extreme ultraviolet, Spherical lenses

PROCEEDINGS ARTICLE | June 22, 2015
Proc. SPIE. 9525, Optical Measurement Systems for Industrial Inspection IX
KEYWORDS: Diffraction, Mirrors, Phase shifting, Point diffraction interferometers, Interferometers, Interferometry, Wavefronts, Wave plates, Optical testing, Spherical lenses

PROCEEDINGS ARTICLE | July 2, 2013
Proc. SPIE. 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems
KEYWORDS: Photovoltaics, Diffraction, Monochromatic aberrations, Point diffraction interferometers, Wavefronts, Chromium, Extreme ultraviolet lithography, Spherical lenses, Optics manufacturing, Edge roughness

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