Haitong Tian
at Univ of Illinois
SPIE Involvement:
Publications (5)

Proceedings Article | 23 October 2015 Paper
Daifeng Guo, Haitong Tian, Yuelin Du, Martin D. Wong
Proceedings Volume 9635, 963522 (2015) https://doi.org/10.1117/12.2197852
KEYWORDS: Model-based design, Lithography, Photomasks, Computer simulations, Optical lithography, Optical simulations, Double patterning technology, Algorithms, Electron beam lithography, Optimization (mathematics)

Proceedings Article | 31 March 2014 Paper
Proceedings Volume 9052, 90520P (2014) https://doi.org/10.1117/12.2046499
KEYWORDS: Electron beam lithography, Lithography, Vestigial sideband modulation, Photomasks, Semiconductors, Optical power tracking algorithms, Double patterning technology, Manufacturing, Optical lithography, Immersion lithography

Proceedings Article | 28 March 2014 Paper
Zigang Xiao, Yuelin Du, Haitong Tian, Martin D. Wong, He Yi, H.-S. Philip Wong
Proceedings Volume 9049, 904920 (2014) https://doi.org/10.1117/12.2045691
KEYWORDS: Lithography, Optical lithography, Electron beam lithography, Optimization (mathematics), Manufacturing, Lithium, Standards development, Annealing, Baryon acoustic oscillations, Directed self assembly

Proceedings Article | 10 September 2013 Paper
Haitong Tian, Hongbo Zhang, Martin Wong
Proceedings Volume 8880, 88800I (2013) https://doi.org/10.1117/12.2026285
KEYWORDS: Photomasks, Lithography, Legal, Optical lithography, Printing, Evolutionary algorithms, Electron beam lithography, Manufacturing, Standards development, Immersion lithography

Proceedings Article | 29 March 2013 Paper
Haitong Tian, Hongbo Zhang, Qiang Ma, Martin D. Wong
Proceedings Volume 8684, 868407 (2013) https://doi.org/10.1117/12.2011670
KEYWORDS: Optical lithography, Lithography, Optical power tracking algorithms, Photomasks, Printing, 193nm lithography, Detection and tracking algorithms, Immersion lithography, Process control, Computer programming

  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top