Dr. Haizheng Zhang
Application Scientist at Entegris Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 10 April 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Semiconductors, Nanoparticles, Particles, Luminescence, Quantum dots, Transmission electron microscopy, Nanocrystals, Spectrophotometry, Spherical lenses, Liquids

Proceedings Article | 3 April 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Semiconductors, Lithography, Etching, Polymers, Spectroscopy, Particles, Chemistry, Photoresist materials, Chemical analysis, Semiconducting wafers

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