Hajime Kawano
at Hitachi High-Tech Corp
SPIE Involvement:
Publications (10)

Proceedings Article | 10 April 2024 Poster + Paper
Proceedings Volume 12955, 1295520 (2024) https://doi.org/10.1117/12.3007173
KEYWORDS: Electric fields, Selenium, Monte Carlo methods, Tunable filters, Statistical analysis, Scanning electron microscopy, Inspection, Sensors, Semiconductors, Scattering

SPIE Journal Paper | 6 April 2019
JM3, Vol. 18, Issue 02, 021204, (April 2019) https://doi.org/10.1117/12.10.1117/1.JMM.18.2.021204
KEYWORDS: Critical dimension metrology, Monte Carlo methods, Electron microscopes, Scanning electron microscopy, Cadmium, Edge detection, Silicon, Optical simulations, Metrology, Inspection

Proceedings Article | 13 March 2018 Paper
Proceedings Volume 10585, 105851A (2018) https://doi.org/10.1117/12.2296756
KEYWORDS: Monte Carlo methods, Scanning electron microscopy, Cadmium, Silicon, Critical dimension metrology, Spatial resolution, Optical simulations, 3D metrology, Semiconductors, Laser scattering

SPIE Journal Paper | 29 June 2017
JM3, Vol. 16, Issue 02, 024004, (June 2017) https://doi.org/10.1117/12.10.1117/1.JMM.16.2.024004
KEYWORDS: Virtual colonoscopy, Scanning electron microscopy, Semiconducting wafers, Metrology, Image filtering

Proceedings Article | 28 March 2017 Paper
Proceedings Volume 10145, 101451K (2017) https://doi.org/10.1117/12.2257205
KEYWORDS: Semiconducting wafers, Metrology, Scanning electron microscopy, Semiconductors, Logic, Logic devices, 3D metrology, Process control, Electrons, Selenium, Silicon, Critical dimension metrology, Image filtering

Showing 5 of 10 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top