Hajime Kawano
at Hitachi High-Tech Science Corp
SPIE Involvement:
Author
Publications (9)

SPIE Journal Paper | 6 April 2019
JM3 Vol. 18 Issue 02
KEYWORDS: Critical dimension metrology, Monte Carlo methods, Electron microscopes, Scanning electron microscopy, Cadmium, Edge detection, Silicon, Optical simulations, Metrology, Inspection

Proceedings Article | 13 March 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Monte Carlo methods, Scanning electron microscopy, Cadmium, Silicon, Critical dimension metrology, Spatial resolution, Optical simulations, 3D metrology, Semiconductors, Laser scattering

SPIE Journal Paper | 29 June 2017
JM3 Vol. 16 Issue 02
KEYWORDS: Virtual colonoscopy, Scanning electron microscopy, Semiconducting wafers, Metrology, Image filtering

Proceedings Article | 28 March 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Semiconducting wafers, Metrology, Scanning electron microscopy, Semiconductors, Logic, Logic devices, 3D metrology, Process control, Electrons, Selenium, Silicon, Critical dimension metrology, Image filtering

Proceedings Article | 28 March 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Electrons, Scanning electron microscopy, Metrology, Signal detection, Semiconductors, Inspection, Sensors, Process control, Semiconductor manufacturing, Manufacturing, Signal generators, 3D metrology, 3D acquisition, Copper, Dielectrics

Showing 5 of 9 publications
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