Prof. Hakaru Mizoguchi
Guest Professor
SPIE Involvement:
Fellows Committee | Conference Program Committee | Author
Publications (126)

Proceedings Article | 10 April 2024 Presentation
Proceedings Volume PC12953, PC129530Q (2024) https://doi.org/10.1117/12.3010018
KEYWORDS: Extreme ultraviolet, Plasma, Semiconductor manufacturing, Carbon dioxide lasers, Tin, Semiconductors, Scattering, Pulsed laser operation, Magnetism, Magnetic semiconductors

Proceedings Article | 30 April 2023 Presentation
Proceedings Volume PC12494, PC124940D (2023) https://doi.org/10.1117/12.2658675
KEYWORDS: Plasma, Extreme ultraviolet, Semiconductor manufacturing, Carbon dioxide lasers, Tin, Semiconductors, Scattering, Scatter measurement, Pulsed laser operation, Magnetism

Proceedings Article | 28 April 2023 Poster + Paper
Proceedings Volume 12494, 1249411 (2023) https://doi.org/10.1117/12.2657640
KEYWORDS: Extreme ultraviolet, Tin, Collector mirrors, Laser irradiation, Light sources, Plasma, Ions, Gas lasers, Hydrogen, Control systems

Proceedings Article | 14 April 2023 Poster
Proceedings Volume PC12494, PC124940J (2023) https://doi.org/10.1117/12.2658263
KEYWORDS: Light sources, Immersion lithography, Semiconductors, Optical components, Manufacturing, Electrodes

Proceedings Article | 1 December 2022 Paper
Proceedings Volume 12292, 122920X (2022) https://doi.org/10.1117/12.2657787
KEYWORDS: Extreme ultraviolet, Mirrors, Deep ultraviolet, Lithography, Light sources, Carbon dioxide lasers, Laser systems engineering, Semiconductors, Photomasks, Inspection