Dr. Hakaru Mizoguchi
Executive Vice President, CTO at Gigaphoton Inc
SPIE Involvement:
Author
Publications (114)

Proceedings Article | 9 April 2020
Proc. SPIE. 11327, Optical Microlithography XXXIII
KEYWORDS: Light sources, Lithography, Scanners, Electroluminescence, Semiconducting wafers, Copper indium disulfide, Projection systems, Chromatic aberrations, Optical lithography, Photomasks