Dr. Hakaru Mizoguchi
Executive Vice President, CTO at Gigaphoton Inc
SPIE Involvement:
Fellow status | Senior status | Author
Publications (101)

PROCEEDINGS ARTICLE | November 16, 2018
Proc. SPIE. 10805, Laser-Induced Damage in Optical Materials 2018: 50th Anniversary Conference
KEYWORDS: Optical components, Microscopes, Laser induced damage, Crystals, Calcium, Laser scattering, Atomic force microscopy, Digital image correlation, Excimer lasers, Surface finishing

PROCEEDINGS ARTICLE | October 12, 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Semiconductors, Lithography, Mirrors, Light sources, Carbon dioxide lasers, Magnetism, Extreme ultraviolet, Semiconductor manufacturing, Extreme ultraviolet lithography, High volume manufacturing

PROCEEDINGS ARTICLE | October 3, 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Semiconductors, Mirrors, Light sources, Magnetism, Gas lasers, Extreme ultraviolet, Picosecond phenomena, Plasma, Tin

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Actuators, Diffraction, Light sources, Oscillators, Electrodes, Laser applications, Laser stabilization, Immersion lithography, Semiconducting wafers, Diffraction gratings

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Lithography, Electrodes, Laser applications, Excimer lasers, Diffraction gratings

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Light sources, Magnetism, Gas lasers, Extreme ultraviolet, Pulsed laser operation, Plasma, Tin

Showing 5 of 101 publications
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