Dr. Han-shin Lee
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Publications (11)

Proceedings Article | 20 May 2016 Paper
Jung-Jin Kim, Junyoul Choi, Soowan Koh, Minho Kim, Jiyoung Lee, Han-Shin Lee, Byung Gook Kim, Chan-uk Jeon
Proceedings Volume 9984, 99840W (2016) https://doi.org/10.1117/12.2246678
KEYWORDS: Air contamination, Photomasks, Molybdenum, Ions, Transmission electron microscopy, Silicon, Critical dimension metrology, Wet etching, Scanners, Pellicles

Proceedings Article | 28 June 2013 Paper
Jongkeun Oh, Junyeol Choi, Jaehyuck Choi, Han-shin Lee, Hyungho Koh, Byunggook Kim, Chanuk Jeon
Proceedings Volume 8701, 870107 (2013) https://doi.org/10.1117/12.2032735
KEYWORDS: Etching, Chlorine, Photomasks, Ions, Mask making, Inspection, Air contamination, Chlorine gas, Crystals, Chemical analysis

Proceedings Article | 23 March 2012 Paper
Jaehyuck Choi, Steve Novak, Yudhishthir Kandel, Greg Denbeaux, Han-shin Lee, Andy Ma, Frank Goodwin
Proceedings Volume 8322, 83220S (2012) https://doi.org/10.1117/12.916499
KEYWORDS: Extreme ultraviolet lithography, Photomasks, Ions, Extreme ultraviolet, Scanning probe microscopy, Chemical analysis, Air contamination, Industrial chemicals, Mask cleaning, Contamination

Proceedings Article | 14 October 2011 Paper
Jaehyuck Choi, Han-shin Lee, Jinsang Yoon, Takeya Shimomura, Alex Friz, Cecilia Montgomery, Andy Ma, Frank Goodwin, Daehyuk Kang, Paul Chung, Inkyun Shin, H. Cho
Proceedings Volume 8166, 81661M (2011) https://doi.org/10.1117/12.896836
KEYWORDS: Photomasks, Scanning probe microscopy, Extreme ultraviolet lithography, Extreme ultraviolet, Ruthenium, Optical lithography, Surface roughness, Reflectivity, Deep ultraviolet, Cadmium

Proceedings Article | 25 September 2010 Paper
Seung-ho Lee, Bong-kyun Kang, Hyuk-min Kim, Min-soo Kim, Han-ku Cho, Chan-uk Jeon, Hyung-ho Ko, Han-shin Lee, Jin-ho Ahn, Jin-Goo Park
Proceedings Volume 7823, 78232Z (2010) https://doi.org/10.1117/12.878895
KEYWORDS: Ruthenium, Ozone, Extreme ultraviolet lithography, Oxygen, Gases, Carbon dioxide, Carbon, Scanning probe microscopy, Lithography, Atomic force microscopy

Showing 5 of 11 publications
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