Dr. Han Huang
at Univ of Queensland
SPIE Involvement:
Publications (5)

Proceedings Article | 9 January 2008
Proc. SPIE. 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
KEYWORDS: Mirrors, Finite element methods, Microelectromechanical systems, Optical filters, Infrared detectors, Digital filtering, Tunable filters, Plasma enhanced chemical vapor deposition, Mechanical engineering, Structural design

Proceedings Article | 21 December 2007
Proc. SPIE. 6798, Microelectronics: Design, Technology, and Packaging III
KEYWORDS: Polishing, Silicon carbide, Surface finishing, Surface roughness, Crystals, Photomicroscopy, Diamond, Silicon, Interferometry, Error analysis

Proceedings Article | 7 July 2005
Proc. SPIE. 5840, Photonic Materials, Devices, and Applications
KEYWORDS: Mirrors, Microelectromechanical systems, Mercury cadmium telluride, Sensors, Optical filters, Short wave infrared radiation, Silicon, Photodiodes, Infrared sensors, Infrared radiation

Proceedings Article | 31 May 2005
Proc. SPIE. 5783, Infrared Technology and Applications XXXI
KEYWORDS: Mirrors, Mercury cadmium telluride, Optical filters, Sensors, Microelectromechanical systems, Photoresistors, Short wave infrared radiation, Fabry–Perot interferometers, Infrared detectors, Silicon

Proceedings Article | 19 May 2005
Proc. SPIE. 5798, Spaceborne Sensors II
KEYWORDS: Thin films, Silicon, Microelectromechanical systems, Silicon films, Thin film deposition, Plasma enhanced chemical vapor deposition, Microsystems, Diamond, Control systems, Reliability

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