Compared with conventional grinding tools, the chemical vapor deposition (CVD) diamond grinding tools have lots of advantages. However, the practical application of CVD grinding tools is limited, because of the small chip-holding space of abrasive layer. Based on the previous research, the structured grinding tools identified as an available method to improve grinding performance. Therefore, the micro-structured CVD diamond tools were invented. In this paper, the picosecond pulse laser was adopted to machine the micro-structures on CVD diamond. The ablation threshold of CVD diamond film was obtained with picosecond pulse laser. And then, the micro-grooves were machined on diamond film surface with different laser machining parameters. The effects of defocus, laser power, scanning speed, scanning times and machining offset on groove width and depth were analyzed respectively.