Hannah Narcross
at
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 20, 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Oxides, Switches, Optical lithography, Polymers, Glasses, Molecules, Silicon, Polymerization, Extreme ultraviolet, Standards development

PROCEEDINGS ARTICLE | March 20, 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Lithography, Light sources, Optical lithography, Polymers, Glasses, Diffusion, Scanning electron microscopy, Polymerization, Extreme ultraviolet, Extreme ultraviolet lithography

PROCEEDINGS ARTICLE | March 20, 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Polymers, Glasses, Molecules, Silicon, Scanning electron microscopy, Polymerization, Line edge roughness, Semiconducting wafers, Photoresist developing, Standards development

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