Hannah M. Ogden
at Univ of Maryland College Park
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 19 March 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Thin films, Lithography, Visible radiation, Optical lithography, Etching, Silicon, Resistance, Photoresist materials, Semiconducting wafers, Plasma

Proceedings Article | 19 March 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Thin films, Lithography, Point spread functions, Optical lithography, Etching, Microscopy, Molecules, Photoresist materials, Stimulated emission depletion microscopy, Absorption

Proceedings Article | 19 March 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Lithography, Diffraction, Beam splitters, Optical parametric oscillators, Polymers, In situ metrology, Molecules, Photoresist materials, Polymerization, Laser beam diagnostics

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