Mr. Hans-Joachim Doering
Senior Scientist at Vistec Electron Beam Lithography Group
SPIE Involvement:
Author
Publications (17)

PROCEEDINGS ARTICLE | March 21, 2012
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Electronics, Error analysis, Distortion, Monte Carlo methods, Photomasks, Line width roughness, Optical simulations, Beam shaping, Stochastic processes, Vestigial sideband modulation

PROCEEDINGS ARTICLE | April 2, 2011
Proc. SPIE. 7970, Alternative Lithographic Technologies III
KEYWORDS: Lithography, Electron beams, Electronics, Sensors, Calibration, Photomasks, Integrated optics, Beam shaping, Prototyping, Vestigial sideband modulation

PROCEEDINGS ARTICLE | April 2, 2011
Proc. SPIE. 7985, 27th European Mask and Lithography Conference
KEYWORDS: Lithography, Statistical analysis, Scanning electron microscopy, Photomasks, Optical simulations, Beam shaping, Logic devices, Optical proximity correction, Standards development, Vestigial sideband modulation

PROCEEDINGS ARTICLE | September 25, 2010
Proc. SPIE. 7823, Photomask Technology 2010
KEYWORDS: Lithography, Electron beam lithography, Metals, Photomasks, Integrated optics, Beam shaping, Source mask optimization, Computational lithography, Optical proximity correction, Vestigial sideband modulation

PROCEEDINGS ARTICLE | September 25, 2010
Proc. SPIE. 7823, Photomask Technology 2010
KEYWORDS: Microelectromechanical systems, Lithography, Electron beam lithography, Electron beams, Optical lithography, Photomasks, Beam shaping, Electron beam direct write lithography, Semiconducting wafers, Vestigial sideband modulation

PROCEEDINGS ARTICLE | April 3, 2010
Proc. SPIE. 7637, Alternative Lithographic Technologies II
KEYWORDS: Lithography, Calibration, Electrodes, Photomasks, Beam shaping, Optical proximity correction, Mask making, Critical dimension metrology, Model-based design, Vestigial sideband modulation

Showing 5 of 17 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top