CONFERENCE PROCEEDINGS
Advanced Search
Dr. Hans-Joachim Jordan
Managing Director at Digital Surf Deutschland GmbH
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 9 November 2001 Paper
Quality assurance of HARMS and MOEMS surface structures using confocal white light microscopy
Hans-Joachim Jordan, Rainer Brodmann, Marcus Grigat, Juergen Valentin
Proceedings Volume 4440, (2001) https://doi.org/10.1117/12.448058
KEYWORDS: Confocal microscopy, Microscopes, 3D metrology, 3D image processing, Microscopy, Sensors, Microopto electromechanical systems, Distance measurement, Light sources, 3D acquisition
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top