Prof. Hans-Werner Schmidt
Professor at Univ Bayreuth
SPIE Involvement:
Author
Publications (25)

PROCEEDINGS ARTICLE | March 21, 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Thin films, Lithography, Optical lithography, Silica, Etching, Polymers, Molecules, Crystals, Silicon, Resistance, Scanning probe lithography, Photoresist materials, Physical vapor deposition

PROCEEDINGS ARTICLE | March 20, 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Thin films, Lithography, Electron beam lithography, Optical lithography, Etching, Glasses, Crystals, Resistance, Scanning probe lithography, Plasma etching

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Lithography, Electron beam lithography, Optical lithography, Etching, Polymers, Glasses, Silicon, Resistance, Scanning probe lithography, Photoresist processing

PROCEEDINGS ARTICLE | March 27, 2014
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Magnesium, Optical spheres, Stars, Quartz, Polymers, Crystals, Scanning electron microscopy, Polymerization, Line width roughness, Line edge roughness

PROCEEDINGS ARTICLE | June 3, 2010
Proc. SPIE. 7730, Optical Data Storage 2010
KEYWORDS: Holography, Modulation, Data storage, Polymers, Glasses, Multiplexing, Chromophores, Absorbance, Holographic materials, Absorption

PROCEEDINGS ARTICLE | March 31, 2010
Proc. SPIE. 7639, Advances in Resist Materials and Processing Technology XXVII
KEYWORDS: Semiconductors, Lithography, Magnesium, Polymers, Glasses, Molecules, Silicon, Photoresist materials, Line edge roughness, Semiconducting wafers

Showing 5 of 25 publications
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