Dr. Hans Artmann Profile

Dr. Hans Artmann

at Robert Bosch GmbH

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Publications (1)

Proceedings Article | 16 January 2003 Paper

Monocrystalline Si membranes for pressure sensors fabricated by a novel surface-micromachining process using porous silicon

Hans Artmann, Frank Schaefer, Gerhard Lammel, Simon Armbruster, Hubert Benzel, Christoph Schelling, Heribert Weber, Heinz-Georg Vossenberg, Ronald Gampp, Joerg Muchow, Franz Laermer, Stefan Finkbeiner

Proceedings Volume 4981, (2003) https://doi.org/10.1117/12.479564

KEYWORDS: Silicon, Sensors, Annealing, Etching, Oxides, Surface micromachining, Doping, Semiconducting wafers, Silicon films, Microelectromechanical systems

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