Dr. Hans Artmann
at Robert Bosch GmbH
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | January 16, 2003
Proc. SPIE. 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II
KEYWORDS: Microelectromechanical systems, Oxides, Sensors, Etching, Annealing, Silicon, Doping, Silicon films, Semiconducting wafers, Surface micromachining

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