Dr. Hans Joachim Büchner
at Technische Univ Ilmenau
SPIE Involvement:
Author
Publications (10)

PROCEEDINGS ARTICLE | May 18, 2009
Proc. SPIE. 7356, Optical Sensors 2009
KEYWORDS: Reflectors, Mirrors, Prisms, Beam splitters, Interferometers, Sensors, Calibration, Head, Distance measurement, Diodes

PROCEEDINGS ARTICLE | October 25, 2006
Proc. SPIE. 6280, Third International Symposium on Precision Mechanical Measurements
KEYWORDS: Microscopes, Mirrors, Metrology, Interferometers, Sensors, Atomic force microscopy, Nanoprobes, Optical testing, Spatial resolution, Sensor technology

PROCEEDINGS ARTICLE | March 24, 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Nanotechnology, Microscopes, Mirrors, Metrology, Interferometers, Sensors, Atomic force microscopy, Optical testing, Spatial resolution, Sensor technology

PROCEEDINGS ARTICLE | February 14, 2005
Proc. SPIE. 5776, Eighth International Symposium on Laser Metrology
KEYWORDS: Mirrors, Metrology, Interferometers, Sensors, Calibration, Wafer inspection, Photomasks, Scanning probe microscopy, System integration, Sensor technology

PROCEEDINGS ARTICLE | December 20, 2004
Proc. SPIE. 5594, Physics and Applications of Optoelectronic Devices
KEYWORDS: Mirrors, Interferometers, Sensors, Photodiodes, Wave propagation, Transparent conductors, Signal detection, Optics manufacturing, Wave propagation interference, Phase shifts

PROCEEDINGS ARTICLE | September 10, 2004
Proc. SPIE. 5457, Optical Metrology in Production Engineering
KEYWORDS: Photodetectors, Mirrors, Reflection, Interferometers, Sensors, Coating, Reflectivity, Photodiodes, Transparent conductors, Phase shifts

Showing 5 of 10 publications
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