Traceable calibrations of various micro and nano measurement devices are crucial tasks for ensuring reliable
measurements for micro and nanotechnology. Today metrological AFM are widely used for traceable
calibrations of nano dimensional standards. In this paper, we introduced the developments of metrological force
microscopes at PTB. Of the three metrological AFMs described here, one is capable of measuring in a volume of
25 mm x 25 mm x 5 mm. All instruments feature interferometers and the three-dimensional position
measurements are thus directly traceable to the metre definition. Some calibration examples on, for instance,
flatness standards, step height standards, one and two dimensional gratings are demonstrated.
The research of Odile Meulien and Dietmar Ohlmann is about perceiving a multidimensional world. Not about the cyberspace created for new cinema creation, nor the reality which seems to be created by communication. It's the search for the reality we perceive, when the mind "touches" an object with its senses. In fact, it is a study of the surface of an object, which we can record in its visual appearing, its structure, shape and colors. When using photographic media, the tactile sense of the structure is missing, when using some other reproductive media; we experience somewhere a sensation of fault, something different. When using holography, we are able to record some three dimensional shape which has in fact a lot of parameter of a realistic copy. What is missing is the touch, the smell, the way we can go close and far, surround the object, relate the reflected light to its surrounding. The only interesting attribute of a hologram is for Dietmar Ohlmann its capacity to illustrate a continuum. He likes its changing diffractive character during daytime and surrounds lighting. For Odile Meulien the continuum of a hologram represents a new possible model for understanding wholeness in a social context. In fact, both are working on an educational process together, helping children and adults to find a new position of their own in harmony with living surrounding. Dietmar Ohlmann is working on his artistic side, while Odile Meulien works on educational programs experiencing the perspective of a curator and social analyst. New is the implication of using the latest of the techniques like the atomic force microscopy, which make possible to touch the holographic grating while the holographic image remains untouched. In other words it is the reverse of the usual approach of objects which at first we touch to investigate further. Their difference in experiencing and perceiving scientific and technical approach brings a lot of paradigm in their discussion. Together they will perform this exchange, as a matrix, understood as source, of new ideas.
A novel compact sensor head combining optical interference and scanning probe microscopy in a single instrument has been developed. The instrument is able to perform complementary quantitative measurements, combining fast non-destructive three-dimensional surface analysis with high lateral resolution imaging. The sensor head has been integrated within the architecture of a commercial interference microscope. The combined instrument makes available both the acquisition software and the hardware interface of the commercial microscope. Furthermore, the use of an optical fiber to transmit light from an external laser removes a major heat source from the measurement environment and its small diameter makes aperture correction unnecessary. Lateral resolution is extended by the attachment of a specially designed scanning probe microscope (SPM) module to the microscope objective. The SPM unit is based upon piezo-resistive cantilever technology and is self-sensing to ensure a compact design that satisfies working distance criteria defined by the optics. A major benefit of the system, in terms of a quantitative nano-metrology, is the possibility to perform a traceable and direct calibration of the SPM module. Ellipsometry has been used to quantify the impact of material differences upon interference height data. Corrected values show excellent agreement with SPM height data.