Dr. Hans Ulrich Danzebrink
Head of Working Group 5.15 at Physikalisch-Technische Bundesanstalt
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | December 31, 2010
Proc. SPIE. 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation
KEYWORDS: Nanotechnology, Microscopes, Metrology, Digital signal processing, Interferometers, Sensors, Calibration, Atomic force microscopy, Signal processing, Motion measurement

PROCEEDINGS ARTICLE | April 21, 2005
Proc. SPIE. 5742, Practical Holography XIX: Materials and Applications
KEYWORDS: Holograms, Holography, Visualization, Glasses, Photography, Atomic force microscopy, Zoom lenses, Semiconducting wafers, Surface finishing, Brain

PROCEEDINGS ARTICLE | September 10, 2004
Proc. SPIE. 5457, Optical Metrology in Production Engineering
KEYWORDS: Ellipsometry, Microscopes, Interferometers, Sensors, Calibration, Silicon, Head, Objectives, Scanning probe microscopy, Phase shifts

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