We have fabricated microthruster chip pairs - one chip with microthruster structures such as injection capillaries,
combustion chamber and nozzle, the other chip with platinum thin film devices such as resistance temperature
detectors (RTDs) and a heater. The platinum thin film was sputtered on thermally oxidized silicon wafers
WITHOUT adhesion layer. The effects of anneal up to 1050°C on the surface morphology of platinum thin films
with varied geometry as well as with / without PECVD-SiO2 coating were investigated in air and N2 and results
will also be presented. Electrical characterization of sensors was carried out in a furnace tube in which the
sensors' temperature was varied between room temperature and 1000°C with a ramp of ±5Kmin-1 in air and N2.
The experiments showed that the temperature-resistance characteristics of sensors had stabilized after the first
heating up to 1000°C in N2. After stabilization the sensors underwent further 8 temperature cycles which
correspond to over 28h of operation time between 800 - 1000°C. To reduce the loss of combustion heat, chip
material around the microthruster structures was partially removed. The effects of thermal insulation were
investigated with microthruster chip pairs which were clamped together mechanically. The heater power was
varied up to 20W and the temperature distribution in the chip pairs with / without thermal insulation was
monitored with 7 integrated thin film sensors.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.