Dr. Hans W.P. Koops
CEO at HaWilKo GmbH
SPIE Involvement:
Publications (14)

Proceedings Article | 28 June 2005 Paper
Proc. SPIE. 5838, Nanotechnology II
KEYWORDS: Microelectromechanical systems, Electron beams, Titanium, Metals, Particles, Ions, Resistance, Ionization, Thin film coatings, Free electron lasers

Proceedings Article | 17 December 2003 Paper
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Electron beams, Etching, Quartz, Image processing, Molecules, Chromium, Scanning electron microscopy, Ion beams, Photomasks, Silicon carbide

Proceedings Article | 28 August 2003 Paper
Proc. SPIE. 5130, Photomask and Next-Generation Lithography Mask Technology X
KEYWORDS: Lithography, Electron beam lithography, Electron beams, Gemini Observatory, Signal attenuation, Etching, Magnetism, Ion beams, Photomasks, Silicon carbide

Proceedings Article | 28 May 2003 Paper
Proc. SPIE. 5148, 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents
KEYWORDS: Electron beams, Interferometers, Etching, Quartz, Control systems, Platinum, Scanning electron microscopy, Photomasks, Silicon carbide, Charged-particle lithography

Proceedings Article | 24 April 2003 Paper
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Electron beams, Etching, Metals, Molecules, Ions, Computing systems, Photonic crystals, Control systems, Rapid manufacturing, Nanolithography

Showing 5 of 14 publications
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