Prof. Hao-Chih Liu
Assistant Professor at National Cheng Kung Univ
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 9 April 2008
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Lithography, Metrology, Silicon, Atomic force microscopy, Scanning electron microscopy, Head, Distance measurement, Critical dimension metrology, Self-assembled monolayers

Proceedings Article | 22 March 2008
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Metrology, Calibration, Scanners, Error analysis, Image restoration, Atomic force microscopy, Transmission electron microscopy, Reconstruction algorithms, Critical dimension metrology, Photomicroscopy

Proceedings Article | 5 April 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Metrology, Calibration, Image processing, Image restoration, Feature extraction, Atomic force microscopy, Transmission electron microscopy, Reconstruction algorithms, Critical dimension metrology, Photomicroscopy

Proceedings Article | 5 April 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Metrology, Silicon, 3D modeling, Atomic force microscopy, Transmission electron microscopy, Zoom lenses, Scanning probe microscopy, Critical dimension metrology, System on a chip, Carbon nanotubes

Proceedings Article | 24 March 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Metrology, Calibration, Silicon, Image restoration, Atomic force microscopy, Scanning electron microscopy, Transmission electron microscopy, Extreme ultraviolet, Critical dimension metrology, Photomicroscopy

Showing 5 of 6 publications
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