Digital interferometer is widely used for evaluating optical surfaces due to its outstanding sub-nanometer accuracy and precision. In this paper, we will summarize its advantages and then describe its applications in industry, especially in both absolute flat and cylindrical surface and measurements. Inner surfaces measurement of cylindrical ring can be achieved without map stitching, by a Fizeau interferometer with a 90° conical mirror. The alignment of this arrangement, however, is very crucial to the accomplishment. Any small misplacement of 90° cone or hollow cylinder from their ideal settings may result in large measurement errors. These errors are not intuitive and hard to be removed if their origins are not well understood. In other words, it is very important to know how these measurement errors are generated from the optical misalignment in order to eliminate them. Transmission flat has normally 1/20 wavelength PV. However, when a flat surface under test is better or much better than the transmission flat, we need the absolute flat measurement. We developed a new method to be easily able to achieve the accuracy of 1/100 wavelength PV. We have dedicated our efforts to do so. The theoretical analysis, computer simulations, and experimental validation are presented in the paper.
In the experiment of researching the nanometer laser interferometer, our design of laser interferometer circuit system is up to the wireless communication technique of the 802.15.4 IEEE standard, and we use the RF TI provided by Basic to receive the data on speed control system software. The system’s hardware is connected with control module and the DC motor. However, in the experiment, we found that single chip microcomputer control module is very difficult to drive the DC motor directly. The reason is that the DC motor's starting and braking current is larger than the causing current of the single chip microcomputer control module. In order to solve this problem, we add a driving module that control board can transmit PWM wave signal through I/O port to drive the DC motor, the driving circuit board can come true the function of the DC motor’s positive and reversal rotation and speed adjustment. In many various driving module, the L298N module’s integrated level is higher compared with other driver module. The L298N model is easy to control, it not only can control the DC motor, but also achieve motor speed control by modulating PWM wave that the control panel output. It also has the over-current protection function, when the motor lock, the L298N model can protect circuit and motor. So we use the driver module based on L298N to drive the DC motor. It is concluded that the L298N driver circuit module plays a very important role in the process of driving the DC motor in the DC motor speed control system.
There are a lot of shortcomings with traditional optical adjustment in interferometry, such as low accuracy, time-consuming, labor-intensive, uncontrollability, and bad repetitiveness, so we treat the problem by using wireless remote control system. Comparing to the traditional method, the effect of vibration and air turbulence will be avoided. In addition the system has some peculiarities of low cost, high reliability and easy operation etc. Furthermore, the switching between two charge coupled devices (CCDs) can be easily achieved with this wireless remote control system, which is used to collect different images. The wireless transmission is achieved by using Radio Frequency (RF) module and programming the controller, pulse width modulation (PWM) of direct current (DC) motor, real-time switching of relay and high-accuracy displacement control of FAULHABER motor are available. The results of verification test show that the control system has good stability with less than 5% packet loss rate, high control accuracy and millisecond response speed.
Optical flat is commonly used in optical testing instruments, flatness is the most important parameter of forming errors. As measurement criteria, optical flat flatness (OFF) index needs to have good precision. Current measurement in China is heavily dependent on the artificial visual interpretation, through discrete points to characterize the flatness. The efficiency and accuracy of this method can not meet the demand of industrial development. In order to improve the testing efficiency and accuracy of measurement, it is necessary to develop an optical flat verification system, which can obtain all surface information rapidly and efficiently, at the same time, in accordance with current national metrological verification procedures. This paper reviews current optical flat verification method and solves the problems existing in previous test, by using new method and its supporting software. Final results show that the new system can improve verification efficiency and accuracy, by comparing with JJG 28-2000 metrological verification procedures method.