To obtain low jitter and high energy ultraviolet laser pulse, the XeCl excimer laser pumped by electron-beam was reported. The construction and the principle of the XeCl excimer laser with electron-beam pump source were described. Experimental study on laser output characteristic of the XeCl excimer laser was carried out, and effects on pressure of mix gas in laser chamber and charge voltage on jitter of laser pulse were showed. When the charge voltage of the laser is 81kV, the output energy of XeCl excimer laser was about 100J, its electric efficiency was about 0.58%, and the laser pulse jitter was less than 20ns.
In the high-power laser device, through precisely positioning the target and pointing multiple laser beams at a very small area on the target surface, the laser power density coupled with the target can be greatly improved and is conducive to the research of laser-induced plasma experiments. This paper proposes a set of target positioning and laser beam pointing system, which has advantages of high experiment efficiency, high target positioning and laser pointing accuracy. This system can automatically correct the attitude and position of targets, and make all laser converge together by adjusting their incident directions. It was verified that the target positioning error is 14.83 µm and the beam guidance accuracy is 9.70 µm.
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