Dr. Hao Lee Xu
Technical Account Manager at Brewer Science Inc
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 1, 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Optical lithography, Polymers, Molecules, Scanning electron microscopy, Photoresist materials, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Neodymium, Semiconducting wafers

PROCEEDINGS ARTICLE | December 4, 2008
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Lithography, Etching, Polymers, Molecules, Coating, Electroluminescence, Photoresist materials, Photoresist developing, Polymer thin films, Bottom antireflective coatings

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