Dr. Harald Bosse
Head of Dept 5.2 at Physikalisch-Technische Bundesanstalt
SPIE Involvement:
Conference Program Committee | Conference Co-Chair | Conference Chair | Author
Publications (45)

SPIE Journal Paper | March 30, 2016
OE Vol. 55 Issue 09
KEYWORDS: Calibration, Metrology, Crystals, Dimensional metrology, Nanostructures, Interferometers, Silicon, Transmission electron microscopy, X-ray optics, Atomic force microscopy

PROCEEDINGS ARTICLE | November 2, 2015
Proc. SPIE. 9636, Scanning Microscopies 2015
KEYWORDS: Microscopes, Metrology, Data modeling, Opacity, Calibration, Manufacturing, Atomic force microscopy, Scanning electron microscopy, Dimensional metrology, Photomasks, Line width roughness, Critical dimension metrology, Standards development

SPIE Journal Paper | May 22, 2014
OE Vol. 53 Issue 12
KEYWORDS: Interferometers, Zerodur, Computer programming, Photomasks, Calibration, Metrology, Mirrors, Manufacturing, Microscopes

PROCEEDINGS ARTICLE | October 10, 2013
Proc. SPIE. 8916, Sixth International Symposium on Precision Mechanical Measurements
KEYWORDS: Nanotechnology, Nanostructures, Diffraction, Metrology, Nanoparticles, Particles, Manufacturing, Scanning electron microscopy, Extreme ultraviolet, Scanning probe microscopy

PROCEEDINGS ARTICLE | May 13, 2013
Proc. SPIE. 8788, Optical Measurement Systems for Industrial Inspection VIII
KEYWORDS: Microscopes, Diffraction, Metrology, Imaging systems, Calibration, Optical testing, Objectives, Photomasks, Geometrical optics, Edge roughness

Showing 5 of 45 publications
Conference Committee Involvement (17)
Optical Measurement Systems for Industrial Inspection XI
24 June 2019 | Munich, Germany
Optical Instrument Science, Technology, and Applications
14 May 2018 | Frankfurt, Germany
Modeling Aspects in Optical Metrology
26 June 2017 | Munich, Germany
Optical Measurement Systems for Industrial Inspection X
26 June 2017 | Munich, Germany
Modeling Aspects in Optical Metrology V
23 June 2015 | Munich, Germany
Showing 5 of 17 published special sections
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