Dr. Harald Bosse
Head of Dept 5.2 at Physikalisch-Technische Bundesanstalt
SPIE Involvement:
Conference Program Committee | Author
Publications (41)

SPIE Journal Paper | 30 March 2016
Gaoliang Dai, Ludger Koenders, Jens Flügge, Harald Bosse
OE, Vol. 55, Issue 09, 091407, (March 2016) https://doi.org/10.1117/12.10.1117/1.OE.55.9.091407
KEYWORDS: Calibration, Metrology, Crystals, Dimensional metrology, Nanostructures, Interferometers, Silicon, Transmission electron microscopy, X-ray optics, Atomic force microscopy

Proceedings Article | 2 November 2015 Paper
D. Bergmann, B. Bodermann, H. Bosse, E. Buhr, G. Dai, R. Dixson, W. Häßler-Grohne, K. Hahm, M. Wurm
Proceedings Volume 9636, 96360S (2015) https://doi.org/10.1117/12.2199453
KEYWORDS: Photomasks, Metrology, Critical dimension metrology, Microscopes, Manufacturing, Standards development, Data modeling, Dimensional metrology, Scanning electron microscopy, Line width roughness, Opacity, Calibration, Atomic force microscopy

SPIE Journal Paper | 22 May 2014
Jens Flügge, Rainer Köning, Eugen Schötka, Christoph Weichert, Paul Köchert, Harald Bosse, Horst Kunzmann
OE, Vol. 53, Issue 12, 122404, (May 2014) https://doi.org/10.1117/12.10.1117/1.OE.53.12.122404
KEYWORDS: Interferometers, Zerodur, Computer programming, Photomasks, Calibration, Metrology, Mirrors, Manufacturing, Microscopes

Proceedings Article | 10 October 2013 Paper
Proceedings Volume 8916, 891603 (2013) https://doi.org/10.1117/12.2035957
KEYWORDS: Nanoparticles, Metrology, Nanotechnology, Particles, Scanning probe microscopy, Diffraction, Manufacturing, Extreme ultraviolet, Scanning electron microscopy, Nanostructures

Proceedings Article | 13 May 2013 Paper
Bernd Bodermann, Rainer Köning, Detlef Bergmann, Egbert Buhr, Wolfgang Hässler-Grohne, Jens Flügge, Harald Bosse
Proceedings Volume 8788, 87881S (2013) https://doi.org/10.1117/12.2021888
KEYWORDS: Calibration, Optical testing, Microscopes, Imaging systems, Edge roughness, Metrology, Objectives, Photomasks, Geometrical optics, Diffraction

Showing 5 of 41 publications
Proceedings Volume Editor (4)

SPIE Conference Volume | 23 May 2011

SPIE Conference Volume | 17 June 2009

SPIE Conference Volume | 18 June 2007

Conference Committee Involvement (21)
Optical Instrument Science, Technology, and Applications III
10 April 2024 | Strasbourg, France
Optical Measurement Systems for Industrial Inspection XIII
26 June 2023 | Munich, Germany
Optical Instrument Science, Technology, and Applications II
13 September 2021 | Online Only, Spain
Optical Measurement Systems for Industrial Inspection XII
21 June 2021 | Online Only, Germany
Optical Measurement Systems for Industrial Inspection XI
24 June 2019 | Munich, Germany
Showing 5 of 21 Conference Committees
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