Prof. Harald Schenk
Director Fraunhofer IPMS at Fraunhofer-Institut für Photonische Mikrosysteme
SPIE Involvement:
Conference Program Committee | Symposium Committee | Symposium Chair | Conference Chair | Journal Editorial Board Member | Author | Editor
Area of Expertise:
MEMS , optical MEMS , MOEMS , micro machining , light modulators , actuators
Websites:
Profile Summary

Application focused Research and Development of MEMS and MEMS based systems including design, simulation, process integration and pilot fabrication. Special Know-how and experience in micro scanning mirrors (e. g. for projection, metrology and imaging) light modulators (e. g. for lithography, adaptive optics), electrostatic micro and nano actuators, MEMS process technology incl. CMOS integration, MEMS reliability and product qualification, project management.
More than 140 publications and more than 20 patents/patent applications.
Professor for Micro- and Nanosystems at Brandenburg Technical University, Cottbus. Director of Fraunhofer IPMS, Dresden. Co-founder of HiperScan (NIR micro spectrometers and spectroscopic solutions)
Publications (104)

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Mirrors, Beam steering, Imaging systems, Scanners, Coating, Laser marking, Microopto electromechanical systems, Micromirrors, Analog electronics, Phased array optics

PROCEEDINGS ARTICLE | February 20, 2017
Proc. SPIE. 10116, MOEMS and Miniaturized Systems XVI
KEYWORDS: Microelectromechanical systems, Actuators, Etching, Electrodes, Silicon, Transducers, Aluminum, Field emission displays, Semiconducting wafers, Surface micromachining

PROCEEDINGS ARTICLE | February 27, 2015
Proc. SPIE. 9375, MOEMS and Miniaturized Systems XIV
KEYWORDS: Diffraction, Mirrors, Cameras, Sensors, Light scattering, Interferometry, CCD cameras, Micromirrors, Stray light, Scatter measurement

PROCEEDINGS ARTICLE | February 8, 2015
Proc. SPIE. 9370, Quantum Sensing and Nanophotonic Devices XII
KEYWORDS: Mirrors, Backscatter, Scanners, Spectroscopy, Quantum cascade lasers, Imaging spectroscopy, Microopto electromechanical systems, Chemical analysis, Explosives, Diffraction gratings

PROCEEDINGS ARTICLE | May 21, 2014
Proc. SPIE. 9101, Next-Generation Spectroscopic Technologies VII
KEYWORDS: Microelectromechanical systems, Packaging, Signal to noise ratio, Near infrared, Mirrors, FT-IR spectroscopy, Sensors, Spectrometers, Spectral resolution, System integration

SPIE Journal Paper | March 20, 2014
JM3 Vol. 13 Issue 01
KEYWORDS: Microelectromechanical systems, Mirrors, Protactinium, Fourier transforms, Microopto electromechanical systems, Actuators, System integration, Spectrometers, FT-IR spectroscopy, Prototyping

Showing 5 of 104 publications
Conference Committee Involvement (26)
MOEMS and Miniaturized Systems XVIII
2 February 2019 | San Francisco, California, United States
MOEMS and Miniaturized Systems XVII
30 January 2018 | San Francisco, California, United States
MOEMS and Miniaturized Systems XVI
30 January 2017 | San Francisco, California, United States
MOEMS and Miniaturized Systems XV
15 February 2016 | San Francisco, California, United States
MOEMS and Miniaturized Systems XIV
9 February 2015 | San Francisco, California, United States
Showing 5 of 26 published special sections
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