Prof. Harald Schenk
Director Fraunhofer IPMS at Fraunhofer-Institut für Photonische Mikrosysteme
SPIE Involvement:
Editorial Board Member: Journal of Micro/Nanolithography, MEMS, and MOEMS | Author | Editor
Area of Expertise:
MEMS , optical MEMS , MOEMS , micro machining , light modulators , actuators
Profile Summary

Application focused Research and Development of MEMS and MEMS based systems including design, simulation, process integration and pilot fabrication. Special Know-how and experience in micro scanning mirrors (e. g. for projection, metrology and imaging) light modulators (e. g. for lithography, adaptive optics), electrostatic micro and nano actuators, MEMS process technology incl. CMOS integration, MEMS reliability and product qualification, project management.
More than 140 publications and more than 20 patents/patent applications.
Professor for Micro- and Nanosystems at Brandenburg Technical University, Cottbus. Director of Fraunhofer IPMS, Dresden. Co-founder of HiperScan (NIR micro spectrometers and spectroscopic solutions)
Publications (99)

Proceedings Article | 28 February 2020
Proc. SPIE. 11293, MOEMS and Miniaturized Systems XIX
KEYWORDS: Microelectromechanical systems, Actuators, Capacitors, Silicon, Complex systems, Solids, Differential equations, Finite element methods, Acoustics

Proceedings Article | 20 March 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Mirrors, Beam steering, Imaging systems, Scanners, Coating, Laser marking, Microopto electromechanical systems, Micromirrors, Analog electronics, Phased array optics

Proceedings Article | 20 February 2017
Proc. SPIE. 10116, MOEMS and Miniaturized Systems XVI
KEYWORDS: Microelectromechanical systems, Actuators, Etching, Electrodes, Silicon, Transducers, Aluminum, Field emission displays, Semiconducting wafers, Surface micromachining

Proceedings Article | 27 February 2015
Proc. SPIE. 9375, MOEMS and Miniaturized Systems XIV
KEYWORDS: Diffraction, Mirrors, Cameras, Sensors, Light scattering, Interferometry, CCD cameras, Micromirrors, Stray light, Scatter measurement

Proceedings Article | 8 February 2015
Proc. SPIE. 9370, Quantum Sensing and Nanophotonic Devices XII
KEYWORDS: Mirrors, Backscatter, Scanners, Spectroscopy, Quantum cascade lasers, Imaging spectroscopy, Microopto electromechanical systems, Chemical analysis, Explosives, Diffraction gratings

Showing 5 of 99 publications
Proceedings Volume Editor (6)

SPIE Conference Volume | 16 March 2012

SPIE Conference Volume | 10 February 2011

SPIE Conference Volume | 16 February 2010

SPIE Conference Volume | 6 February 2009

SPIE Conference Volume | 7 February 2008

Showing 5 of 6 publications
Conference Committee Involvement (26)
MOEMS and Miniaturized Systems XVIII
2 February 2019 | San Francisco, California, United States
MOEMS and Miniaturized Systems XVII
30 January 2018 | San Francisco, California, United States
MOEMS and Miniaturized Systems XVI
30 January 2017 | San Francisco, California, United States
MOEMS and Miniaturized Systems XV
15 February 2016 | San Francisco, California, United States
MOEMS and Miniaturized Systems XIV
9 February 2015 | San Francisco, California, United States
Showing 5 of 26 Conference Committees
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