Dr. Hari Pathangi
at IMEC
SPIE Involvement:
Author
Publications (8)

SPIE Journal Paper | April 11, 2017
JM3 Vol. 16 Issue 02
KEYWORDS: Directed self assembly, Line edge roughness, Line width roughness, Lithography, Metrology, Scanning electron microscopy, Silicon, Critical dimension metrology, Image segmentation, Picosecond phenomena

PROCEEDINGS ARTICLE | April 1, 2016
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Lithography, Optical lithography, Atmospheric plasma, Etching, Annealing, Chemical vapor deposition, Photoresist materials, Directed self assembly, Semiconducting wafers, Front end of line

PROCEEDINGS ARTICLE | March 25, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Nanotechnology, Lithography, Nanostructures, Metrology, Ions, Silicon, Scanning electron microscopy, Line width roughness, Picosecond phenomena, Critical dimension metrology, Line edge roughness, Neodymium, Nanolithography, Correlation function

PROCEEDINGS ARTICLE | March 22, 2016
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Lithography, Metrology, Optical lithography, Etching, Polymers, Silicon, Manufacturing, Scanning electron microscopy, Bridges, Directed self assembly, Epitaxy, Thin film coatings, Semiconducting wafers

SPIE Journal Paper | July 2, 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Etching, Scanning electron microscopy, Silicon, Inspection, Semiconducting wafers, Diffractive optical elements, Defect inspection, Thin film coatings, Directed self assembly

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Metrology, Silicon, Inspection, Scanning electron microscopy, Image quality, Bridges, Directed self assembly, Image classification, Semiconducting wafers, Defect inspection

Showing 5 of 8 publications
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