Unspecified Harin Kim Profile

Harin Kim

at Siemens EDA

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Publications (1)

Proceedings Article | 28 April 2023 Presentation + Paper

Unsupervised ML classification driven process model coverage check

SeungWon Song, Seokyoon Jeong, Sangwoo Park, Jungkee Choi, WoonHyuk Choi, No-young Chung, Seongtae Jeong, Fan Jiang, Liang Cao, Le Hong, Junhyoung Park, Doohwan Kwak, Jongwon Lee, Harin Kim, Jiyoung Lee

Proceedings Volume 12495, 1249518 (2023) https://doi.org/10.1117/12.2658322

KEYWORDS: Data modeling, Process modeling, Machine learning, Optical proximity correction, Statistical modeling, Calibration, Instrument modeling, Metrology, Design and modelling, Resolution enhancement technologies

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