Harish Kumar Bolla
at Advanced Micro Devices Inc
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 12 May 2005
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Lithography, Optical microscopes, Spatial frequencies, Scanners, Light scattering, Computer simulations, Scatterometry, Modulation transfer functions, Critical dimension metrology, Semiconducting wafers

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