Prof. Harmut H. Hillmer
Doctor at Univ Kassel
SPIE Involvement:
Author
Publications (32)

Proceedings Article | 26 April 2016
Proc. SPIE. 9890, Optical Micro- and Nanometrology VI
KEYWORDS: Confocal microscopy, Microscopes, Diffraction, Apodization, Light emitting diodes, Mirau interferometers, Imaging systems, Interferometers, Interferometers, Interferometry, Tomography, 3D metrology, Objectives, Optical tomography, Blue light emitting diodes

Proceedings Article | 2 May 2014
Proc. SPIE. 9126, Nanophotonics V
KEYWORDS: Electron beam lithography, Optical filters, Refractive index, Femtosecond phenomena, Waveguides, Dielectrics, Laser processing, Photonic crystals, Nanophotonics, Pulsed laser operation

SPIE Journal Paper | 1 October 2010
JM3 Vol. 9 Issue 04
KEYWORDS: Etching, Mirrors, Dry etching, Photomasks, Reactive ion etching, Photoresist materials, Distributed Bragg reflectors, Optical filters, Plasma, Ions

Proceedings Article | 14 May 2010
Proc. SPIE. 7726, Optical Sensing and Detection
KEYWORDS: Sensors, Silicon, Diffusion, Photodiodes, Image sensors, Signal processing, Diodes, CMOS technology, Analog electronics, Standards development

Proceedings Article | 16 February 2010
Proc. SPIE. 7591, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III
KEYWORDS: Mirrors, Optical sensors, Titanium dioxide, Silica, Etching, Argon, Dry etching, Scanning electron microscopy, Reactive ion etching, Optical arrays

Proceedings Article | 19 May 2009
Proc. SPIE. 7362, Smart Sensors, Actuators, and MEMS IV
KEYWORDS: Microelectromechanical systems, Mirrors, Sun, Sensors, Electrodes, Metals, Glasses, Sensor networks, Micromirrors, Aluminum

Showing 5 of 32 publications
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