Dr. Harshad Sane
at United Technologies Res Ctr
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 22 January 2005
Proc. SPIE. 5719, MOEMS and Miniaturized Systems V
KEYWORDS: Microelectromechanical systems, Actuators, Mirrors, Switches, Switching, Electrodes, Error analysis, Control systems, Micromirrors, Device simulation

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