Dr. Haruhiko Kusunose
Managing Director at Lasertec Corp
SPIE Involvement:
Publications (25)

Proceedings Article | 9 April 2020 Paper
Proceedings Volume 11323, 113231K (2020) https://doi.org/10.1117/12.2557858
KEYWORDS: Inspection, Photomasks, Extreme ultraviolet lithography, Extreme ultraviolet, Reticles, Defect detection, High volume manufacturing, Particles, Pellicles, Deep ultraviolet

Proceedings Article | 25 November 2019 Open Access Paper
Proceedings Volume 11148, 111480W (2019) https://doi.org/10.1117/12.2538001
KEYWORDS: Photomasks, Inspection, Extreme ultraviolet, Defect inspection, Deep ultraviolet, Defect detection, Semiconducting wafers, Extreme ultraviolet lithography, Lithography, Image resolution

Proceedings Article | 13 July 2017 Paper
Shinobu Ohara, Akinori Yoshida, Mitsuo Hirai, Takenori Kato, Koichi Moriizumi, Haruhiko Kusunose
Proceedings Volume 10454, 1045402 (2017) https://doi.org/10.1117/12.2284332
KEYWORDS: Inspection, Photomasks, Light scattering, Organic light emitting diodes, Digital image correlation, Manufacturing, Laser development, Optics manufacturing, LCDs, Particles

Proceedings Article | 18 March 2016 Paper
Proceedings Volume 9776, 97761G (2016) https://doi.org/10.1117/12.2222747
KEYWORDS: Inspection, Photomasks, Extreme ultraviolet lithography, Light scattering, Multilayers, Defect detection, Extreme ultraviolet, Semiconducting wafers, Lithographic illumination, Mirrors, EUV optics, CCD cameras

Proceedings Article | 9 July 2015 Paper
Proceedings Volume 9658, 96580O (2015) https://doi.org/10.1117/12.2197309
KEYWORDS: Inspection, Mirrors, Lithographic illumination, Extreme ultraviolet, Defect detection, Photomasks, Ray tracing, Data modeling, Extreme ultraviolet lithography, High volume manufacturing

Showing 5 of 25 publications
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