Dr. Haruhiko Kusunose
Managing Director at Lasertec Corp
SPIE Involvement:
Author
Publications (23)

PROCEEDINGS ARTICLE | July 13, 2017
Proc. SPIE. 10454, Photomask Japan 2017: XXIV Symposium on Photomask and Next-Generation Lithography Mask Technology
KEYWORDS: Organic light emitting diodes, Particles, Light scattering, Manufacturing, Laser development, Inspection, LCDs, Photomasks, Digital image correlation, Optics manufacturing

PROCEEDINGS ARTICLE | March 18, 2016
Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII
KEYWORDS: Mirrors, Multilayers, Lithographic illumination, Defect detection, Light scattering, Inspection, CCD cameras, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, EUV optics

PROCEEDINGS ARTICLE | July 9, 2015
Proc. SPIE. 9658, Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII
KEYWORDS: Mirrors, Lithographic illumination, Defect detection, Data modeling, Inspection, Ray tracing, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, High volume manufacturing

PROCEEDINGS ARTICLE | July 28, 2014
Proc. SPIE. 9256, Photomask and Next-Generation Lithography Mask Technology XXI
KEYWORDS: Defect detection, Light scattering, Inspection, Surface roughness, CCD cameras, Photomasks, Extreme ultraviolet lithography, Critical dimension metrology, Semiconducting wafers, Prototyping

PROCEEDINGS ARTICLE | July 28, 2014
Proc. SPIE. 9256, Photomask and Next-Generation Lithography Mask Technology XXI
KEYWORDS: Lithography, Mirrors, Manufacturing, Inspection, Ray tracing, Photomasks, Extreme ultraviolet, Image classification, Extreme ultraviolet lithography, Geometrical optics

PROCEEDINGS ARTICLE | June 28, 2013
Proc. SPIE. 8701, Photomask and Next-Generation Lithography Mask Technology XX
KEYWORDS: Mirrors, Multilayers, Switches, Defect detection, Ions, Inspection, Photomasks, Extreme ultraviolet, Charge-coupled devices, Extreme ultraviolet lithography

Showing 5 of 23 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top