Dr. Harun H. Solak
CEO at Eulitha AG
SPIE Involvement:
Profile Summary

Eulitha provides nanolithography services and equipment for research and production. Its revolutionary PHABLE photolithography systems enable low-cost fabrication of periodic nanostructures over large areas. This proprietary technology has wide ranging uses in photonics, optoelectronics, electronics, biotechnology, telecommunication, photovoltaics, sensors and other areas. Eulitha’s custom and standard ranges of nano-patterned substrates are made with electron-beam or its own PHABLE lithography.
Publications (19)

Proceedings Article | 10 April 2024 Presentation
Kelsey Wooley, Harun Solak, Christian Dais, Francis Clube, Ahmed Mohammad, Iuliia Bykova, Thibault Seure, Mehdi Heydari, Matthew Wilson, Li Wang
Proceedings Volume PC12956, PC129560O (2024) https://doi.org/10.1117/12.3013328
KEYWORDS: Optical lithography, Semiconducting wafers, Photomasks, Lithography, High volume manufacturing, Photonics, Ultraviolet radiation, Standards development, Projection lithography, Deep ultraviolet

Proceedings Article | 10 April 2024 Presentation + Paper
Kelsey Wooley, Maryvonne Chalony, Andrew M. Dawes, Zhixin Wang, Harun Solak, Lawrence Melvin
Proceedings Volume 12954, 1295414 (2024) https://doi.org/10.1117/12.3014541
KEYWORDS: Design, Optical gratings, Manufacturing, Eye, Lithography, Waveguides, Printing, Etching, Diffractive optical elements, Augmented reality

Proceedings Article | 10 April 2024 Presentation + Paper
Zhixin Wang, Li Wang, Harun Solak
Proceedings Volume 12954, 129540M (2024) https://doi.org/10.1117/12.3010197
KEYWORDS: Semiconducting wafers, Lithography, Design, Optical lithography, Scanning electron microscopy, Augmented reality, Inverse optics, Computational lithography, 193nm lithography, Source mask optimization, Machine learning

Proceedings Article | 13 March 2024 Poster
Kelsey Wooley, Andrew M. Dawes, Zhixin Wang, Maryvonne Chalony, Harun Solak, Lawrence Melvin
Proceedings Volume PC12913, PC129130R (2024) https://doi.org/10.1117/12.3003908
KEYWORDS: Waveguides, Modeling, Lithography, Augmented reality, Printing, Manufacturing, Autoregressive models, Optical lithography, Design and modelling, Optics manufacturing

Proceedings Article | 21 November 2023 Presentation + Paper
Andrew M. Dawes, Zhixin Wang, Lawrence Melvin, Bernd Kuechler, Wolfgang Demmerle, Al Blais, Kelsey Wooley, Harun Solak
Proceedings Volume 12751, 127510C (2023) https://doi.org/10.1117/12.2690860
KEYWORDS: Printing, Lithography, Line edge roughness, Semiconducting wafers, Image transmission, Optical gratings, Light sources and illumination, Photoresist processing, Collimation, Optical lithography

Showing 5 of 19 publications
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