Dr. Li He Profile

Dr. Li He

at Shanghai Institute of Technical Physics CAS

SPIE Involvement:

Author | Editor

Publications (54)

Proceedings Article | 2 December 2020 Paper

Dark current mechanism of medium wave HgCdTe avalanche photodiode

Liao Yang, Lu Chen, Huijun Guo, Dan Yang, Chuan Shen, Honglei Chen, Chun Lin, Ruijun Ding, Li He

Proc. SPIE. 11717, 24th National Laser Conference & Fifteenth National Conference on Laser Technology and Optoelectronics

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Proceedings Article | 2 December 2020 Paper

The latest developments of HgCdTe e-APDs at SITP

Huijun Guo, Lu Chen, Liao Yang, Dan Yang, Chuan Shen, Quanzhi Sun, Honglei Chen, Chun Lin, Ruijun Ding, Li He

Proc. SPIE. 11717, 24th National Laser Conference & Fifteenth National Conference on Laser Technology and Optoelectronics

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Proceedings Article | 26 February 2020 Presentation + Paper

Mid-infrared interband cascade light-emitting diodes with InAs/GaAsSb superlattices on InAs substrates

Qi Lu, Yi Zhou, Jianxin Chen, Li He, Anthony Krier

Proc. SPIE. 11284, Smart Photonic and Optoelectronic Integrated Circuits XXII

KEYWORDS: Mid-IR, Quantum wells, Light emitting diodes, Indium arsenide, Superlattices, Arsenic, Molecular beam epitaxy

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Proceedings Article | 31 January 2020 Presentation + Paper

N2-cooled THz quartz-enhanced photoacoustic sensor operating in pulsed mode for hydrogen sulfide detection in the part-per-billion concentration range

Andrea Zifarelli, Angelo Sampaolo, Pietro Patimisco, Marilena Giglio, Chenren Yu, Huan Zhu, Haiqing Zhu, Gaolei Chang, Fangfang Wang, Jianxin Chen, Lianhe Li, A. Giles Davies, Edmund Linfield, Li He, Tingting Wei, Hongpeng Wu, Lei Dong, Gangyi Xu, Frank Tittel, Vincenzo Spagnolo

Proc. SPIE. 11288, Quantum Sensing and Nano Electronics and Photonics XVII

KEYWORDS: Mid-IR, Resonators, Sensors, Sulfur, Hydrogen, Quantum cascade lasers, Terahertz radiation, Photoacoustic spectroscopy, Pulsed laser operation, Liquids, Absorption

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Proceedings Article | 17 May 2019 Paper

The performance of mid-wave infrared HgCdTe e-avalanche photodiodes at SITP

Huijun Guo, Yushun Cheng, Lu Chen, Chun Lin, Hao Li, Honglei Chen, Ruijun Ding, Li He

Proc. SPIE. 11170, 14th National Conference on Laser Technology and Optoelectronics (LTO 2019)

KEYWORDS: Signal to noise ratio, Mid-IR, Avalanche photodetectors, Mercury cadmium telluride, Electrons, Quantum efficiency, Manufacturing, Doping, Ionization, Diodes

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Proceedings Article | 18 June 2018 Paper

A study on ALD ZnS passivation of HgCdTe IRFPAs detectors

A. L. Cui, Z. H. Ye, C. H. Sun, L. F. Liu, X. N. Hu, R. J. Ding, L. He

Proc. SPIE. 10624, Infrared Technology and Applications XLIV

KEYWORDS: Infrared detectors, Infrared imaging, Mercury cadmium telluride, Sensors, Etching, Image processing, Hydrogen, Zinc, Scanning electron microscopy, Atomic layer deposition

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Proceedings Article | 25 May 2017 Paper

A study on inductively coupled plasma etch rate of HgCdTe at cryogenic temperature

F. Liu, Y. Chen, Z. Ye, R. Ding, L. He

Proc. SPIE. 10177, Infrared Technology and Applications XLIII

KEYWORDS: Staring arrays, Infrared detectors, Infrared sensors, Mercury cadmium telluride, Etching, Ions, Surface roughness, Zinc, Scanning electron microscopy, Infrared radiation, Plasma etching, Assembly equipment, Cryogenics, Plasma

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Proceedings Article | 16 May 2017

The development of the infrared technology for meteorological satellites in Shanghai Institute of Technical Physics

W. Lu, L. Ding, L. He, X. Y. Li, J. X. Chen, X. S. Chen

Proc. SPIE. 10177, Infrared Technology and Applications XLIII

KEYWORDS: Infrared detectors, Infrared sensors, Infrared imaging, Imaging systems, Sensors, Image resolution, Meteorological satellites, Spectral resolution, Infrared radiation, Infrared technology

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SPIE Journal Paper | 4 May 2017

Electrical and optical performances of InGaAs/GaAsSb superlattice short-wavelength infrared detectors

Chuan Jin, Jianxin Chen, Qingqing Xu, ChengZhang Yu, Li He

OE Vol. 56 Issue 05

KEYWORDS: Quantum efficiency, Absorption, Superlattices, Laser sintering, Diffusion, Temperature metrology, Infrared detectors, Stereolithography, Arsenic, Short wave infrared radiation

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Proceedings Article | 28 April 2017 Presentation + Paper

Large format high SNR SWIR HgCdTe/Si FPA with multiple-choice gain for hyperspectral detection

Xiaoning Hu, Aibo Huang, Qingjun Liao, Lu Chen, Xin Chen, Hua Fan, Honglei Chen, Ruijun Ding, Li He, Dexin Sun, Yinnian Liu

Proc. SPIE. 10213, Hyperspectral Imaging Sensors: Innovative Applications and Sensor Standards 2017

KEYWORDS: Staring arrays, Readout integrated circuits, Infrared detectors, Signal to noise ratio, Hyperspectral imaging, Short wave infrared radiation, Mercury cadmium telluride, Imaging systems, Sensors, Silicon, Quantum efficiency, Interference (communication), Diodes, Spectral resolution

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Proceedings Article | 1 November 2016 Paper

Optimization of plasma etching of SiO2 as hard mask for HgCdTe dry etching

Yiyu Chen, Zhenhua Ye, Changhong Sun, Shan Zhang, Wen Xin, Xiaoning Hu, Ruijun Ding, Li He

Proc. SPIE. 10157, Infrared Technology and Applications, and Robot Sensing and Advanced Control

KEYWORDS: Mercury cadmium telluride, Silica, Etching, Dry etching, Plasma etching

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Proceedings Article | 1 November 2016 Paper

Studies on different passivation on InAs/GaSb type-II superlattice photodetectors

Yurong Cui, Jianxin Chen, Zhicheng Xu, Jiajia Xu, Yi Zhou, Li He

Proc. SPIE. 10157, Infrared Technology and Applications, and Robot Sensing and Advanced Control

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Proceedings Article | 20 May 2016 Paper

Recent progress on dark current characterization of very long-wavelength HgCdTe infrared photodetectors and HgCdTe APDs in SITP

Weida Hu, Jiale He, Weicheng Qiu, Zhenhua Ye, Lu Chen, Chun Lin, Li He, Xiaoshuang Chen, Wei Lu

Proc. SPIE. 9819, Infrared Technology and Applications XLII

KEYWORDS: Infrared detectors, Long wavelength infrared, Photodetectors, Avalanche photodetectors, Mercury cadmium telluride, Doping, Photodiodes, Infrared radiation, Lutetium, Infrared photography

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Proceedings Article | 20 May 2016 Paper

Inductively coupled plasma etching of HgCdTe IRFPAs detectors at cryogenic temperature

Y. Y. Chen, Z. H. Ye, C. H. Sun, S. Zhang, X. N. Hu, R. J. Ding, L. He

Proc. SPIE. 9819, Infrared Technology and Applications XLII

KEYWORDS: Mercury cadmium telluride, Etching, Argon, Diffusion, Mercury, Scanning electron microscopy, Plasma etching, Reactive ion etching, Cryogenics, Plasma

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Proceedings Article | 20 May 2016 Paper

High operation temperature mid-wavelength interband cascade infrared photodetectors grown on InAs substrate

Yi Zhou, Jianxin Chen, Zhicheng Xu, Li He

Proc. SPIE. 9819, Infrared Technology and Applications XLII

KEYWORDS: Infrared imaging, Mid-IR, Photodetectors, Indium arsenide, Sensors, Electrons, Quantum efficiency, Infrared radiation, Infrared photography, Superlattices

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Proceedings Article | 13 February 2016 Paper

InAs-based type-II superlattice long wavelength photodetectors

Fangfang Wang, Jianxin Chen, Zhicheng Xu, Yi Zhou, Li He

Proc. SPIE. 9755, Quantum Sensing and Nano Electronics and Photonics XIII

KEYWORDS: Long wavelength infrared, Photodetectors, Indium arsenide, Sensors, Diffusion, Imaging spectroscopy, Photodiodes, Gallium antimonide, Infrared radiation, Superlattices, Molecular beam epitaxy, Quantum cryptography, Temperature metrology

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Proceedings Article | 13 May 2015 Paper

Studies on abrupt and gradual band gap hole barriers in InAs/GaSb superlattice long wavelength photodetectors

Yi Zhou, Jianxin Chen, Fangfang Wang, Zhicheng Xu, Zhizhong Bai, Chuan Jin, Li He

Proc. SPIE. 9481, Image Sensing Technologies: Materials, Devices, Systems, and Applications II

KEYWORDS: Photodetectors, Sensors, Quantum efficiency, Gallium antimonide, Aluminum, Infrared technology, Structural design, Superlattices, Stereolithography, Absorption

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Proceedings Article | 13 April 2015 Paper

High performance InAs/GaSb superlattice long wavelength photodetectors based on barrier enhanced structures

Yi Zhou, Jianxin Chen, Fangfang Wang, Zhicheng Xu, Zhizhong Bai, Chuan Jin, Li He

Proc. SPIE. 9522, Selected Papers from Conferences of the Photoelectronic Technology Committee of the Chinese Society of Astronautics 2014, Part II

KEYWORDS: Infrared detectors, Photodetectors, Sensors, Diffusion, Quantum efficiency, Gallium antimonide, Aluminum, Superlattices, Stereolithography, Absorption

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Proceedings Article | 20 November 2014 Paper

Molecular beam epitaxy growth of high quality InAs/GaSb type-II superlattices for long wavelength infrared detection

Fangfang Wang, Jianxin Chen, Zhicheng Xu, Yi Zhou, Qingqing Xu, Li He

Proc. SPIE. 9300, International Symposium on Optoelectronic Technology and Application 2014: Infrared Technology and Applications

KEYWORDS: Infrared detectors, Long wavelength infrared, Sensors, X-ray diffraction, Photodiodes, Gallium antimonide, Atomic force microscopy, Superlattices, Molecular beam epitaxy, Stereolithography

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Proceedings Article | 24 June 2014 Paper

Modeling of LWIR nBn HgCdTe photodetector

Z. Ye, Y. Chen, P. Zhang, C. Lin, X. Hu, R. Ding, L. He

Proc. SPIE. 9070, Infrared Technology and Applications XL

KEYWORDS: Long wavelength infrared, Photodetectors, Mercury cadmium telluride, Cadmium, Sensors, Doping, Sensor performance, Numerical analysis, Neodymium, Heterojunctions

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Proceedings Article | 24 June 2014 Paper

Mercury cadmium telluride implanted junction profile measurement and depth control

Songmin Zhou, Chun Lin, Haibin Li, Yanfeng Wei, Zhenhua Ye, Ruijun Ding, Li He

Proc. SPIE. 9070, Infrared Technology and Applications XL

KEYWORDS: Mercury cadmium telluride, Etching, Chemical species, Annealing, Ions, Mercury, Resistance, 3D metrology, Infrared radiation, Ion implantation

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Proceedings Article | 11 September 2013 Paper

Progress in the CdZnTe single crystal growth and substrates fabrication

Shi-wen Sun, Chang-he Zhou, Hui-xian Yu, Chao Xu, Feng-feng Sheng, Song-yin Sui, Jian-rong Yang, Li He

Proc. SPIE. 8907, International Symposium on Photoelectronic Detection and Imaging 2013: Infrared Imaging and Applications

KEYWORDS: Infrared imaging, Microscopes, Polishing, Cadmium, Etching, Crystals, Zinc, Semiconducting wafers, Crystallography, Surface finishing

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Proceedings Article | 11 September 2013 Paper

Interface design and properties in InAs/GaSb type-II superlattices grown by molecular beam epitaxy

Zhicheng Xu, Jianxin Chen, Fangfang Wang, Yi Zhou, Qingqing Xu, Chuan Jin, Li He

Proc. SPIE. 8907, International Symposium on Photoelectronic Detection and Imaging 2013: Infrared Imaging and Applications

KEYWORDS: Indium arsenide, Chemical species, Interfaces, Gallium antimonide, Atomic force microscopy, Antimony, Superlattices, Molecular beam epitaxy, Camera shutters, Laser sintering

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Proceedings Article | 15 October 2012 Paper

Molecular beam epitaxy of HgCdTe on (211)B CdZnTe

Weiqiang Wang, Lu Chen, Renjie Gu, Chuan Shen, Xiangliang Fu, Yuying Guo, Gao Wang, Feng Yang, Li He

Proc. SPIE. 8419, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Sensing, Imaging, and Solar Energy

KEYWORDS: Oxides, Optical microscopes, Diffraction, FT-IR spectroscopy, Mercury cadmium telluride, Cadmium, Crystals, Molecular beam epitaxy, Temperature metrology, Oxidation

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Proceedings Article | 15 October 2012 Paper

Dark current analysis of long wavelength InAs/GaSb superlattice infrared detector

Yi Zhou, Jianxin Chen, Qingqing Xu, Zhicheng Xu, Chuan Jin, Jiajia Xu, Li He

Proc. SPIE. 8419, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Sensing, Imaging, and Solar Energy

KEYWORDS: Infrared detectors, Infrared sensors, Indium arsenide, Silica, Sensors, Diffusion, Gallium antimonide, Medium wave, Superlattices, Stereolithography

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Proceedings Article | 15 October 2012 Paper

N2 atmosphere annealing effect on HgCdTe electrical damage induced by ICP etching process

Jian Huang, Zhenhua Ye, Wenting Yin, Hanjie Hu, Chun Lin, Xiaoning Hu, Ruijun Ding, Li He

Proc. SPIE. 8419, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Sensing, Imaging, and Solar Energy

KEYWORDS: Infrared imaging, Mercury cadmium telluride, Sensors, Etching, Annealing, Mercury, Photodiodes, Image sensors, Plasma etching, Array processing

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Proceedings Article | 15 October 2012 Paper

The accurate measurement of background carrier concentration in short-period longwave InAs/GaSb superlattices on GaSb substrate

Zhicheng Xu, Jianxin Chen, Qingqing Xu, Yi Zhou, Chuan Jin, Fangfang Wang, Li He

Proc. SPIE. 8419, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Sensing, Imaging, and Solar Energy

KEYWORDS: Long wavelength infrared, Indium arsenide, Etching, Magnetism, Gallium antimonide, Wet etching, Superlattices, Stereolithography, Laser sintering, Temperature metrology

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Proceedings Article | 31 May 2012 Paper

Studies on a novel mask technique with high selectivity and aspect-ratio patterns for HgCdTe trenches ICP etching

Z. Ye, W. Hu, Y. Li, J. Huang, W. Yin, C. Lin, X. Hu, R. Ding, X. Chen, W. Lu, L. He

Proc. SPIE. 8353, Infrared Technology and Applications XXXVIII

KEYWORDS: Optical lithography, Mercury cadmium telluride, Silica, Etching, Scanning electron microscopy, Silicon films, Infrared radiation, Plasma etching, Standards development, Plasma

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Proceedings Article | 8 September 2011 Paper

A novel junction profile measurement in HgCdTe epilayer by laser beam induced current

Haibin Li, Jingjie Xu, Songmin Zhou, Chun Lin, Li He

Proc. SPIE. 8193, International Symposium on Photoelectronic Detection and Imaging 2011: Advances in Infrared Imaging and Applications

KEYWORDS: Semiconductors, Infrared imaging, Mercury cadmium telluride, Chemical species, Mercury, Photodiodes, Infrared radiation, Ion implantation, Medium wave, Arsenic

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Proceedings Article | 8 September 2011 Paper

X-ray diffraction analysis of high quality InAs/GaSb Type II superlattices grown by MBE

Yi Zhou, Jianxin Chen, Qingqing Xu, Li He

Proc. SPIE. 8193, International Symposium on Photoelectronic Detection and Imaging 2011: Advances in Infrared Imaging and Applications

KEYWORDS: Indium arsenide, Satellites, X-ray diffraction, Interfaces, Gallium antimonide, Antimony, Superlattices, Stereolithography, Camera shutters, Absorption

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Proceedings Article | 7 May 2009 Paper

The development of HgCdTe infrared detector technology in China

W. Lu, L. He, X. Chen, L. Ding, S. Sun, J. Tang, J. Su

Proc. SPIE. 7298, Infrared Technology and Applications XXXV

KEYWORDS: Staring arrays, Infrared detectors, Infrared sensors, Mercury cadmium telluride, Sensors, Spectroscopy, Silicon, Infrared spectroscopy, Infrared radiation, Lutetium

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Proceedings Article | 9 February 2009 Paper

A study of Hg1-xCdxTe surfaces processed using inductively coupled plasma with CH4/H2/N2/Ar mixture

Wenhong Zhou, Zhenhua Ye, Xiaoning Hu, Ruijun Ding, Li He

Proc. SPIE. 7158, 2008 International Conference on Optical Instruments and Technology: Microelectronic and Optoelectronic Devices and Integration

KEYWORDS: Mercury cadmium telluride, Etching, Argon, Dry etching, Atomic force microscopy, Plasma etching, Chemical analysis, Scanning probe microscopy, Reactive ion etching, Plasma

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Proceedings Article | 17 January 2008 Paper

Surface defects induced by impurities in MBE-grown HgCdTe

Xiangliang Fu, Weiqiang Wang, Qingzhu Wei, Jun Wu, Lu Chen, Yan Wu, Li He

Proc. SPIE. 6835, Infrared Materials, Devices, and Applications

KEYWORDS: Staring arrays, Infrared imaging, Mercury cadmium telluride, Microscopy, Crystals, Mercury, Scanning electron microscopy, Infrared radiation, Photomicroscopy, Tellurium

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Proceedings Article | 8 January 2008 Paper

Performance and reliability characteristic of Stirling cryocoolers

X. Liu, Y. Wu, L. He

Proc. SPIE. 6835, Infrared Materials, Devices, and Applications

KEYWORDS: Infrared detectors, Contamination, Reliability, Finite element methods, Infrared radiation, Analytical research, Helium, Failure analysis, Cryocoolers, Cryogenics

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Proceedings Article | 8 January 2008 Paper

Characterization of multilayered HgCdTe for MW/LW two-color application

Qingzhu Wei, Wenhong Zhou, Weiqiang Wang, Xiangliang Fu, Meifang Yu, Lu Chen, Yan Wu, Li He

Proc. SPIE. 6835, Infrared Materials, Devices, and Applications

KEYWORDS: Infrared detectors, Multilayers, Mercury cadmium telluride, Sensors, Interfaces, Indium, Doping, Scanning electron microscopy, Infrared radiation, Medium wave

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Proceedings Article | 14 October 2005 Paper

Low energy inductively coupled plasma etching of HgCdTe

Xiaoning Hu, Zhenhua Ye, Ruijun Ding, Li He, Glenn Tan, Ligang Deng

Proc. SPIE. 5964, Detectors and Associated Signal Processing II

KEYWORDS: Mercury cadmium telluride, Silica, Etching, Argon, Dry etching, Electrodes, Ions, Plasma etching, Anisotropic etching, Plasma

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Proceedings Article | 10 January 2005 Paper

Molecular beam epitaxy growth of CdTe on Si(211)

Lu Chen, Yuan Zhang Wang, Yan Wu, Jun Wu, Mei Fang Yu, Yi Min Qiao, Li He