Ms. Heather A. Florence Profile

Heather A. Florence

Senior Application Engineer at SAES

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Publications (1)

Proceedings Article | 23 December 2003 Paper

Chemical treatment of getter films on wafers prior to vacuum packaging

Marco Moraja, Marco Amiotti, Heather Florence

Proceedings Volume 5343, (2003) https://doi.org/10.1117/12.525099

KEYWORDS: Semiconducting wafers, Microelectromechanical systems, Silicon, Wafer bonding, Packaging, Glasses, Particles, Industrial chemicals, Carbon monoxide, Silicon films

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