Heather Polgrean
at IBM Corp
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Extreme ultraviolet, Polymers, Extreme ultraviolet lithography, Ions, Optical lithography, Stochastic processes, Data modeling, Interfaces, Solids, Systems modeling

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