Hector I. Garcia
Product Marketing Manager at KLA Corp
SPIE Involvement:
Publications (9)

Proceedings Article | 28 August 2003 Paper
Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.504059
KEYWORDS: Inspection, Reticles, SRAF, Semiconducting wafers, Defect detection, Ultraviolet radiation, Databases, Lithography, 193nm lithography, Defect inspection

Proceedings Article | 2 June 2003 Paper
Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.504577
KEYWORDS: Inspection, Reticles, Defect detection, Critical dimension metrology, Semiconducting wafers, Image segmentation, Lithography, Detection and tracking algorithms, Defect inspection, Algorithm development

Proceedings Article | 28 May 2003 Paper
Proceedings Volume 5148, (2003) https://doi.org/10.1117/12.515100
KEYWORDS: Inspection, Reticles, Defect detection, Lithography, Algorithm development, Contamination, Databases, Phase shifts, Defect inspection, Photomasks

Proceedings Article | 27 December 2002 Paper
Proceedings Volume 4889, (2002) https://doi.org/10.1117/12.468207
KEYWORDS: Inspection, Reticles, Defect detection, Semiconducting wafers, Critical dimension metrology, Photomasks, Lithography, Defect inspection, Databases, Algorithm development

Proceedings Article | 16 August 2002 Paper
Proceedings Volume 4764, (2002) https://doi.org/10.1117/12.479351
KEYWORDS: Inspection, Reticles, Image transmission, Databases, Data modeling, Defect detection, Optical proximity correction, Algorithm development, Detection and tracking algorithms, Image processing

Showing 5 of 9 publications
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