Dr. Hee Yeoun Kim
Head of Dept at National Nanofab Ctr
SPIE Involvement:
Author
Publications (10)

Proceedings Article | 1 April 2016
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Lithography, Nanostructures, Electron beam lithography, Solar energy, Polymers, Nickel, Silicon, Platinum, Nanolithography, Electro optic polymers, Process engineering, Polymeric sensors, Polymeric actuators

Proceedings Article | 19 March 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Lithography, Nanostructures, Lenses, Polymers, Nickel, Silicon, Platinum, Infrared radiation, Infrared lenses, Nanolithography

Proceedings Article | 19 June 2013
Proc. SPIE. 8704, Infrared Technology and Applications XXXIX
KEYWORDS: Amorphous silicon, Packaging, Microbolometers, Wafer-level optics, Sensors, Reliability, Resistance, Semiconducting wafers, Wafer testing, Wafer bonding

Proceedings Article | 15 October 2012
Proc. SPIE. 8512, Infrared Sensors, Devices, and Applications II
KEYWORDS: Infrared sensors, Antireflective coatings, Sensors, Germanium, Silicon, Zinc, Silicon films, Transmittance, Semiconducting wafers, Autoregressive models

Proceedings Article | 31 May 2012
Proc. SPIE. 8353, Infrared Technology and Applications XXXVIII
KEYWORDS: Microelectromechanical systems, Packaging, Infrared sensors, Sensors, Germanium, Silicon, Oxygen, Transmittance, Semiconducting wafers, Absorption

Proceedings Article | 31 May 2012
Proc. SPIE. 8353, Infrared Technology and Applications XXXVIII
KEYWORDS: Amorphous silicon, Readout integrated circuits, Microbolometers, Thermography, Infrared imaging, Sensors, Materials processing, Resistance, Capacitance, Semiconducting wafers

Showing 5 of 10 publications
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