Hee M. Jeong
at Hanyang Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 5 April 2007 Paper
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Ellipsometry, Refractive index, Optical properties, Imaging systems, Water, Ultraviolet radiation, Spectroscopic ellipsometry, Immersion lithography, Liquids, Absorption

Proceedings Article | 20 July 1999 Paper
Proc. SPIE. 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS
KEYWORDS: Actuators, Transformers, Curium, Capacitors, Dielectrics, Ultrasonics, Capacitance, Transducers, Finite element methods, Fermium

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