Mrs. Heike Wagner
at PTB
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 23, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Mirrors, Multilayers, Sensors, Coating, Reflectivity, Reflectometry, Extreme ultraviolet, Extreme ultraviolet lithography, Off axis mirrors, EUV optics

PROCEEDINGS ARTICLE | May 6, 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Mirrors, Multilayers, Metrology, Sensors, Reflectivity, Reflectometry, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Temperature metrology

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