Mr. Heiko Schaefer
at Univ Siegen
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 24, 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Amorphous silicon, Thin films, Microfluidics, Glasses, Silicon, Chromium, Lab on a chip, Diodes, Transistors, Transparent conductors

PROCEEDINGS ARTICLE | April 24, 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Gold, Microfluidics, Electrodes, Polymers, Metals, Glasses, Chromium, Platinum, Photoresist materials, Semiconducting wafers

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top