Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Mathematical modeling, Microelectromechanical systems, Digital signal processing, Sensors, Electrodes, Amplifiers, Control systems, Electroluminescence, System identification, Systems modeling
This paper presents the whole process of building up a high precision, high dynamical MEMS acceleration sensor. The first samples have achieved a resolution of better than 500 ug and a bandwidth of more than 200 Hz. The sensor fabrication technology is shortly covered in the paper. A theoretical model is built from the physical principles of the complete sensor system, consisting of the MEMS sensor, the charge amplifier and the PWM driver for the sensor element. The mathematical modeling also covers problems during startup. A reduced order model of the entire system is used to design a robust control with the Mixed-Sensitivity H-infinity Approach. Since the system has an unstable pole, imposed by the electrostatic field and time delay, caused by A/D-D/A conversation delay and DSP computing time, limitations for the control design are given. The theoretical model might be inaccurate or lacks of completeness, because the parameters for the theoretical model building vary from sample to sample or might be not known. A new identification scheme for open or closed-loop operation is deployed to obtain directly from the samples the parameters of the mechanical system and the voltage dependent gains. The focus of this paper is the complete system development and identification process including practical tests in a DSP TI-TMS320C3000 environment.