Dr. Heinz-Ulrich Scheunemann
at BESSY GmbH
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | May 2, 2008
Proc. SPIE. 6792, 24th European Mask and Lithography Conference
KEYWORDS: Gold, Carbon, Ultraviolet radiation, X-rays, Photoresist materials, Photomasks, Vitreous, Beryllium, Electroplating, X-ray lithography

PROCEEDINGS ARTICLE | April 24, 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Carbon, Polishing, Transparency, Glasses, X-rays, Silicon, Photomasks, Silicon carbide, Beryllium, X-ray lithography

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