Helena K. Klos
at Institute of Electron Technology
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 22 December 2016
Proc. SPIE. 10175, Electron Technology Conference 2016
KEYWORDS: Mirrors, Optical lithography, Image segmentation, Photons, Silicon, Diffusion, Reflectivity, Photodiodes, Photomasks, Aluminum

Proceedings Article | 22 December 2016
Proc. SPIE. 10175, Electron Technology Conference 2016
KEYWORDS: Photovoltaics, Sensors, Photography, Laser applications, Laser development, Photodiodes, Laser stabilization, Photomasks, Aluminum, Laser metrology

Proceedings Article | 10 November 2016
Proc. SPIE. 10161, 14th International Conference on Optical and Electronic Sensors
KEYWORDS: Microelectromechanical systems, Metals, Silicon, Reliability, 3D modeling, Plasma etching, Optimization (mathematics), Semiconducting wafers, Device simulation, Lead

Proceedings Article | 19 August 2014
Proc. SPIE. 9291, 13th International Scientific Conference on Optical Sensors and Electronic Sensors
KEYWORDS: X-rays, Silicon, Scintillators, Photography, Photodiodes, Detector arrays, Aluminum, Scintillation, X-ray detectors, Lead

Proceedings Article | 19 August 2014
Proc. SPIE. 9291, 13th International Scientific Conference on Optical Sensors and Electronic Sensors
KEYWORDS: Sensors, Etching, Silicon, Diffusion, Detector development, Aluminum, Boron, Phosphorus, Semiconducting wafers, Oxidation

Showing 5 of 7 publications
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